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  • 方正微 2007-2014 roadmap

    Road Map for FMIC Process
    CMOS Logic&Mixed Mode(逻辑与混合) BCD/Analog/ Bipolar (BCD /模拟/双极)Power MOSFET/IGBT(功率器件IGBT)
        MEMS/Memory/Others(MEMS/储存和其他)
    Si-GATE
    CMOS
    0.35um SPTM 1.5VMG2.0um NPSM 1.5V/5VPlanar
    DMOS
    2.0um Planar DMOS 600V
    0.35um SPDM 5V2.25um NPSM 1.5V/3V1.0um Planar DMOS 500-650V
    0.4um SPSM Flatcell2.5um NPSM 3V/5V1.0um Planar DMOS(Shrink) 200-800V
    0.40 um Embedded Flash6.0um NPSM 18VTrench
    DMOS
    0.4um Trench DMOS 20-75V
    0.5um SPSM 1.5v 5V6.0um NPSM 24V0.4um Trench DMOS 100V
    0.5um DPSM 5V2.0um Metal Gate 5V0.4um  Trench DMOS(ESD) 20V
    0.5um SPDM 5V6um Metal Gate 30V0.4um Trench DMOS(P) 20-30V
    0.5um DPDM 40V2.5um Metal Gate 5V0.4um Trench 20-75V DMOS
    0.5um OTPBCDMOS
    BiCMOS
    800V CDMOS0.4um Trench DMOS PCH 60-100V
    0.6um SPSM 5V 0.4u Trench DMOS(P) 60V
    0.6um SPDM 5V1.0um BCD 700VTrench
    SBD
     
    0.6um DPSM/DM 5V1.5um 1P2M BCD 30V 
    0.8um SPSM 5V1.0um 1P2M BCD 30V 
    0.8um SPDM 5V3.0um BCD 700V 
    0.8um  Mixed Mode1.5um 1P2M BCD 30V 
     1.0um 1P2M BCD 30V 
    0.5um 1P1M 5V1.0um 1P2M  40V 
    2.25um Metal Gate 5V0.8um BCD 20VMOS
    SBD
     
    0.6um 1P1M 5V1.0um BCD 700V 
    0.8um 1P2M 5V0.4um Trench  PCH  20-30V 
    0.6um 2P2M 5V/18V  
    0.6um 1P2M 5V1.0µm 700V BiCMOS 
    0.5um 1P1M 1.5V0.5µm 20-60V BiCMOS 
    0.35um 1P3M 1.5V1.0µm 5-30V BiCMOS 
    0.5um Mixed Mode  IGBT600-1200V
    0.35um 1P2M 5V  IGBT  1000-1200V
    0.5 um 2P2M 40VBipolar1.0um Bipolar 24V/40VIGBT  600-1000V
    0.5um  1P2M 5VMEMS0.4um Flat cell 1P1M 5V 
    0.8umMixed Mode0.5um 120V Schottky0.5um Trench 45-120V
    0.8/1.0um 2P2M 40V0.5um OTP 
    0.5um 2P1M 5V0.5um 45-100V Schottky 
      MEMSJFET 
      0.40 umEmbedded FlashTVS 
        GaNenhanced MOSFET 
        HV CMOS0.8/1.0um 2P2M 40V
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  • 原文地址:https://www.cnblogs.com/ncepu/p/13694969.html
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